Transmission electron microscopy study of ultra-thin SiC layers obtained by rapid thermal carbonization of Si wafers
نویسندگان
چکیده
F. M. Morales* , S. I. Molina, D. Araújo, V. Cimalla, J. Pezoldt, L. Barbadillo, M. J. Hernández, and J. Piqueras 1 Departamento de Ciencia de los Materiales e Ingeniería Metalúrgica y Química Inorgánica, Universidad de Cádiz, Apdo. 40, Puerto Real, 11510-Cádiz, Spain 2 TU Ilmenau, FG Nanotechnologie, Zentrum für Mikround Nanotechnologien, Postfach 100565, 98684 Ilmenau, Germany 3 Laboratorio de Microelectrónica, Facultad de Ciencias, C-XI 100, Universidad Autónoma de Madrid, 28049 Cantoblanco, Madrid. Spain
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تاریخ انتشار 2003